A Hybrid Method to Simulate an Inductively Coupled Ar-hg Plasma
نویسندگان
چکیده
A hybrid method is used in simulating an inductively coupled Ar-Hg discharge plasma. In this hybrid model the combination of plasma fluid model and the Boltzmann Equation is applied. With this model, not only the “macroscopic” parameters of the discharge, such as electron density, electron temperature, can be simulated, but also the electron behavior can be derived, which is not accessible in mere fluid model.
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